Design And Manufacture Of Anti-Ir Thin Films For Resin Lens

In this paper, the application background of anti-IR thin films for resin lens is outlined. SiO2 and Si3N4 are chosen as coating materials. Mid-frequency pulse magnetron sputtering is adopted to prepare the thin films. Deposition rate is calibrated by fitting the measured transmission spectrum of high-reflective thin films, which can improve the precision of film thickness monitoring. Anti-IR thin films and visible range anti-reflective thin films are successfully deposited on the convex and concave surface of CR39 resin lens, respectively. The spectral properties, surface morphology and microstructure of the deposited thin films are characterized by ultraviolet-visible spectrophotometer, scanning electron microscopy (SEM) and atomic force microscope (AFM), respectively. The results show that the averaged transmittivity of the resin lens after coating exceeds 97% in 420 similar to 680 nm, and is below 55% in 800 similar to 1350 nm at normal incidenct angle. Anti-IR thin films have a uniform distribution and compact microstructures on the lens.