Effects of annealing on the structure and magnetic properties of Ba-ferrite films prepared by RF magnetron sputtering at low temperature

The films were prepared in the pure Ar atmosphere whose Si-substrate is not heated during preparation. The effect of annealing temperature on the vertical orientation of c-axis of the film was also investigated, and the results show that if the film is annealed in the oxygen atmosphere at 700��C, the favorable orientation of the c-axis of the film can be realized whose saturated magnetization and coercive force are Ms=296emu/c.c., Hc=308,761 A/m; whereas any deviation to the 700��C annealing temperature is unfavorable to the formation of favorite orientation of c-axis.