STM study on the fine structure of ZnO UFP thin film surface

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology(1996)

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摘要
The surface fine structure as tiny as atomic size of ZnO UFP films prepared by the deposition method with DC gas discharge activating reaction was observed in air by STM, and studied by X-ray diffraction to explore the fine structure of the surface. On this basis, the models for the growth process and formation mechanism of the films were established.
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