Preparation and ferroelectric characteristics of multilayer thin films

Xingjiao Li,Jianhong Zhao,Chengwu An,Zaiguang Li,Shaoping Li

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics（1997）

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摘要

Ferroelectric BIT, PZT/BIT and BIT/PZT/BIT thin films were successfully deposited on Si(100) substrates by pulsed excimer laser. The crystallization of these thin films were characterized using XRD. The ferroelectricity of these thin films were measured using Sawyer-Tower circuits. The relationship between ferroelectricity and multilayer structures was discussed.

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