Submicron Electro-Optic Measurement Technique Using an External Hemispherical Probe
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE(2000)
摘要
In this paper an external electro-optic measuring system based on a hemispherical GaAs probe is presented. By using the system, the electrical signals propagating on a microstrip transmission line are successfully measured. The spatial resolution of the system, which is limited by the focused probing spot size, is about 0.5 micrometers , when the wavelength of the probing beam is 1.3 micrometers .
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关键词
electro-optic measurement,sub-micron,solid immersion lens,spatial resolution
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