Single-Step In-Situ Preparation Of Magnesium Diboride Superconducting Thin Films By Dc Magnetron Sputtering

P Ma,Ly Liu,Sy Zhang,X Wang,Fx Xie,P Deng,Rj Nie,Sz Wang,Yd Dai,Fr Wang

ACTA PHYSICA SINICA（2002）

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摘要

In a single-step in-situ procedure, the superconducting MgB2, (101) highly oriented thin films have been successfully grown on the SrTiO3 (100) substrates by using the synthesised MgB2 target and controlling the magetron sputtering working at the state of abnormal glow discharge or arc discharge. The fillms have a zero resistance transition temperature of 15K and an onset transition temperature of 33K.

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关键词

high-temperature superconductor,superconducting thin films,magnetron sputtering,MgB2

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