The Effect Of Fabry-Perot Interference On The Packaging Of Soi-Based Optoelectronic Devices

Hongli Xin,Peng Chen,Fang Li,Chunxia Wang,Peng Cao,Yuliang Liu

2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS（2004）

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摘要

During the packaging of optoelectrome device, a problem always met is the instability of output power. The main effect causing this problem, Fabry-Perot interference, is discussed in this paper. Both theoretical analysis and experimental test are carried out and in good agreement. As an example of avoiding the disadvantage of Fabry-Perot interference, the packaging process of Silicon-on-Insulator (SOI) based Variable Optical Attenuator(VOA) is shown at last.

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关键词

light interference,silicon on insulator,fabry perot,optoelectronic devices,packaging

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