Pendulum Micromechanical Angular Accelerometer with Force Feedback

This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsion-spring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an electrostatic force device for feedback loop. The sensor's structure and basic operating principle were discussed. The theoretical relation of angular acceleration and output of sensor was derived in detail based on the geometrical and dynamical models. The simulation result shows that the scale factor of sensor is 0.388917 V / r / s and verifies the accuracy of the theories model. It can be used in robust motor control of industrial robots and aerocraft.