Development and application of large format QWIP FPA

Proceedings of SPIE - The International Society for Optical Engineering(2009)

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摘要
320×256 GaAs/AlGaAs Quantum Well Infrared Photodetector (QWIP) Focal Plane Array (FPA) was successfully prepared. The material design, device fabrication, performance measurement, as well as thermal imaging by the first QWIP FPA thermal imager was addressed in this paper. Further development and application of large format QWIP FPA detector was also presented. Based on the mature material growth and devices processing technology the large format III-V QWIP focal plane array was characteristic of promising mass production ability with high performance, good repeatability, good uniformity and low cost. Besides, the flexible Energy-Band Engineering of III-V QWIP technology made QWIP FPA as the advanced Third-Gen infrared detector technology now and in the future. © 2009 SPIE.
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关键词
focal plane array,gaas/algaas,large format,nedt,qwip,fabrication,gallium arsenide,sensors,engineering,mass production
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