Deterministical magnetorheological finishing of optical aspheric mirrors

Anew method magnetorheological finishing (MRF) used for deterministical finishing of optical aspheric mirrors is applied to overcome some disadvantages including low finishing efficiency, long iterative time and unstable convergence in the process of conventional polishing. Based on the introduction of the basic principle of MRF, the key techniques to implement deterministical MRF are also discussed. To demonstrate it, a 200 mm diameter K9 class concave asphere with a vertex radius of 640mm was figured on MRF polish tool developed by ourselves. Through one process about two hours, the surface accuracy peak-to-valley (PV) is improved from initial 0.216λλ to final 0.179λ and root-mean-square (RMS) is improved from 0.027λ to 0.017λ (λ = 0.6328um ). High-precision and high-efficiency convergence of optical aspheric surface error shows that MRF is an advanced optical manufacturing method that owns high convergence ratio of surface figure, high precision of optical surfacing, stabile and controllable finishing process. Therefore, utilizing MRF to finish optical aspheric mirrors determinately is credible and stabile; its advantages can be also used for finishing optical elements on varieties of types such as plane mirrors and spherical mirrors. © 2009 SPIE.