High-Density Pmut Array For 3-D Ultrasonic Imaging Based On Reverse-Bonding Structure

High-density piezoelectric micromachined ultrasonic transducer (pMUT) arrays have been designed and fabricated using silicon based micromachined process. These devices are based on a novel structure called "reverse-bonding". Experimental results show that they have excellent performance, suitable resonance frequency and high reliability. The fabricated pMUT arrays are very promising for 3-D medical imaging.