Bit Patterned Magnetic Recording: Theory, Media Fabrication, and Recording Performance

Magnetics, IEEE Transactions  (2015)

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摘要
Bit Patterned Media (BPM) for magnetic recording provides a route to thermally stable data recording at >1 Tb/in2 and circumvents many of the challenges associated with extending conventional granular media technology. Instead of recording a bit on an ensemble of random grains, BPM is comprised of a well ordered array of lithographically patterned isolated magnetic islands, each of which stores one bit. Fabrication of BPM is viewed as the greatest challenge for its commercialization. In this article we describe a BPM fabrication method which combines rotary-stage e-beam lithography, directed self-assembly of block copolymers, self-aligned double patterning, nanoimprint lithography, and ion milling to generate BPM based on CoCrPt alloy materials at densities up to 1.6 Td/in2 (teradot/inch2). This combination of novel fabrication technologies achieves feature sizes of <10 nm, which is significantly smaller than what conventional nanofabrication methods used in semiconductor manufacturing can achieve. In contrast to earlier work which used hexagonal close-packed arrays of round islands, our latest approach creates BPM with rectangular bitcells, which are advantageous for integration of BPM with existing hard disk drive technology. The advantages of rectangular bits are analyzed from a theoretical and modeling point of view, and system integration requirements such as provision of servo patterns, implementation of write synchronization, and providing for a stable head-disk interface are addressed in the context of experimental results. Optimization of magnetic alloy materials for thermal stability, writeability, and tight switching field distribution is discussed, and a new method for growing BPM islands from a specially patterned underlayer – referred to as “templated growth” – is presented. New recording results at 1.6 Td/in2 (roughly equivalent to 1.3 Tb/in2) demonstrate a raw error rate <10-2, which is consistent with the rec- rding system requirements of modern hard drives. Extendibility of BPM to higher densities, and its eventual combination with energy assisted recording are explored.
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关键词
bit patterned media,co alloys,areal density,block copolymer,double patterning,e-beam lithography,hard disk drive,interface anisotropy,magnetic multilayers,magnetic recording,nanoimprint lithography,prepatterned servo,self-assembly,sequential infiltration,synthesis,templated growth,thermal annealing,write synchronization,media,fabrication,bit error rate,e beam lithography,nanolithography,electron beam lithography,polymer blends,semiconductor manufacturing,soft lithography,self assembly,ion milling,thermal stability,block copolymers
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