Design and Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

In this paper, we demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in an optical cross-connect. We show switching times of less than 10 ms and optical power stability of better than 0.2 dB. The mirrors, made from 10-mu m-thick single-crystal silicon and with a radius of 400-450 mu m, are able to tilt to 8 degrees corresponding to 80% of touchdown angle. This is achieved using a nonlinear closed-loop control algorithm, which also results in a maximum actuation voltage of 85 V, and a pointing accuracy of less than 150 mu rad. This paper will describe the MEMS mirror and actuator design, modeling, servo design, and measurement results.