Functional and Technological Integration of Measurement Microsystems
IEEE instrumentation & measurement magazine(2004)
摘要
The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro-opto-electrical system (MOEM...
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关键词
Electric variables measurement,Signal processing,Digital signal processing,Instruments,Semiconductor device measurement,Length measurement,Time measurement,Application specific integrated circuits,Microelectronics,Digital signal processing chips
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