Surface-micromachined Fabry-Perot tunable filter for wavelength-division multiplexing systems
Anaheim, CA, USA（1996）
摘要
Summary form only given. In conclusion we have developed a low-temperature surface micromachining process that can be applied to various substrates such as Si, glass, and GaAs. We have demonstrated a tunable optical filter with a 60 nm tuning range near 1.5 /spl mu/m, and a transmission linewidth of 5 nm. This device might find applications in WDM systems and optical sensing.
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关键词
integrated optics,micromachining,multiplexing equipment,optical communication equipment,optical fabrication,optical filters,optical sensors,tuning,wavelength division multiplexing,gaas,si,wdm systems,glass,low-temperature surface micromachining process,nm tuning range,optical sensing,substrates,surface-micromachined fabry-perot tunable filter,transmission linewidth,tunable optical filter,wavelength-division multiplexing systems,gallium arsenide,surface micromachining,fabry perot,surface waves
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