Convection-based micromachined inclinometer using SOI technology

S Billat,H Glosch,M Kunze,F Hedrich,J Frech, J Auber,Walter Lang,Hermann Sandmaier,Wolfgang Wimmer

Interlaken, Switzerland（2001）

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摘要

This paper presents a novel inclinometer operating with the free-convection heat transfer principle which has been developed at the HSG-IMIT for the VOGT electronic company. The use of SOI-technology permits a short technological process for the sensor fabrication and a very good mechanical stability like a high reproducibility. Using free convection properties the sensor presents a high resolution (0.007/spl deg/), a great sensitivity and baseline stability.

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关键词

angular measurement,mechanical stability,micromachining,microsensors,natural convection,silicon-on-insulator,soi technology,si,free convection,heat transfer,inclinometer,reproducibility,resolution,sensitivity,sensor fabrication,silicon on insulator,high resolution

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