The alignment of carbon nano tube between Aluminum electrodes using AC dielectrophoresis method

Low Foo Wah,Nur Hamidah Abdul Halim,U Hashim,Nuzaihan Md Nor,Shahidah Arina Shamsuddin

Micro and Nanoelectronics（2011）

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摘要

This paper presents the recent development and fabrication of carbon nanotubes (CNT) based on electrical devices. The silicon oxide is formed by dry oxidation and the Aluminum (Al) layer is deposited using Thermal Evaporator. The electrodes pad act as a bridge for CNT alignment. Then, this single-walled carbon nanotubes (SWNTs) was suspended in isopropyl alcohol (IPA) and Dichloromethane (DCM) solution in ultrasonic condition around 1 hour continuously. Then, the aligment of the CNT was carried out using AC dielectrophoresis and DC electrophoresis method.

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关键词

aluminium,carbon nanotubes,electrochemical electrodes,electrophoresis,oxidation,silicon compounds,ac dielectrophoresis method,al,cnt fabrication,dc electrophoresis method,sio2,aluminum electrode pad,carbon nanotube alignment,dichloromethane solution,dry oxidation,electrical devices,isopropyl alcohol,single-walled carbon nanotubes,thermal evaporator,cnt,dielectrophoresis,carbon nanotube,silicon,aluminum,scanning electron microscopy,electrodes

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