Positioning FBAR technology in the frequency and timing domain.

Rich Ruby,Martha K Small,Frank Bi,Don Lee,Lori Callaghan,Reed Parker,Steve Ortiz

IEEE transactions on ultrasonics, ferroelectrics, and frequency control（2012）

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摘要

This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated. One technology differentiator is the size of the chip-scale packaged resonator. Another is that the silicon lid is perfectly suitable for placement of integrated circuits and this is currently being done. Many factors (wide tuning range, high Q, high frequency, small size, integrated circuitry) are being used to differentiate potential products for the time and frequency markets.

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关键词

acoustic resonators,time domain,zero-drift resonator,bulk acoustic wave devices,resonators,time markets,integrated circuits,chip-scale packaged resonator,frequency markets,technical differentiation,mechanical resonator technology,fbar technology positioning,frequency domain,positioning fbar technology,timing domain,zdr,film bulk acoustic resonator,mechanical resonator,silicon lid,time-frequency analysis,oscillators,high frequency,crystals,time frequency analysis,chip scale package,couplings,integrated circuit,resonant frequency,oscillations

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