Near-infrared photon emission spectroscopy of a 45 nm SOI ring oscillator

Ulrike Kindereit,Alan J Weger,Franco Stellari,Peilin Song,Herve Deslandes,Ted Lundquist, Prasad Sabbineni

Reliability Physics Symposium（2012）

引用 20|浏览6

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摘要

This paper presents, for the first time, near-infrared spectral photon emission measurements of a ring oscillator in IBM's 45 nm SOI process technology. The setup employs a cryogenically cooled MCT camera and different band-pass filters with a very broad spectral range from 850-2100 nm. The paper presents the spectral data, discusses the thermal contributions, and analyzes its impact for selecting appropriate detectors and tools for time-resolved measurements in present and future technology nodes.

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关键词

band-pass filters,infrared spectroscopy,oscillators,silicon-on-insulator,ibm soi process technology,soi ring oscillator,cryogenically cooled mct camera,near-infrared photon emission spectroscopy,near-infrared spectral photon emission measurement,size 45 nm,thermal contributions,time-resolved measurements,hgcdte,mct,pem,photon emission microscopy,soi,failure analysis,red shift,spectroscopy,silicon on insulator,switches,band pass filters,temperature measurement,photonics

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