InAs photodiode on semi-insulating GaAs substrate with Zn-diffusion guard-ring for high-speed and low dark current performance

Denver, CO(2010)

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摘要
We demonstrate InAs photodiodes on semi-insulating GaAs substrate with Zn-diffusion guard-ring. It exhibits a 3-dB bandwidth as wide as 17 GHz under a small bias (-0.2V) with a reasonable dark current density (11A/cm2) at room temperature.
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关键词
iii-v semiconductors,diffusion,gallium arsenide,indium compounds,optical receivers,photodiodes,substrates,zinc,gaas,bandwidth 17 ghz,dark current density,photodiode,semi-insulating substrate,temperature 293 k to 298 k,zinc-diffusion guard-ring,room temperature,bandwidth,dark current
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