Complex peripheral Lamb modes in FBARs
Ultrasonics Symposium（2013）
摘要
In this paper we give experimental observations of the complex valued Lamb mode in a FBAR resonator, using the AIM [1] and standard S-parameter measurements. Furthermore, a theoretical explanation of the observed behavior, based on the Berlincourt formula for the effective coupling coefficient, is offered. This explanation proposes a laterally “self-confined” mode that arises through the mechanical boundary conditions present at the periphery of the resonator structure.
更多查看译文
关键词
acoustic resonators,surface acoustic waves,berlincourt formula,fbar,complex peripheral lamb modes,coupling coefficient,experimental analysis,resonator structure,self-confined mode,theoretical analysis,acoustic imaging microscope,complex mode,plate wave dispersion,couplings,electrodes,resonant frequency,dispersion,tungsten
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要