MEMS and MEMS based strain gauge load cells — A review
Research & Technology in the Coming Decades（2013）
摘要
This paper deals with the review of MEMS technology and MEMS based load cells/force sensors. A brief introduction to the MEMS technology, strain gauge and load cells/force sensors is given. Design of load cells / force sensors using various materials and their impacts in the design are reviewed and discussed.
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关键词
force sensors,micromechanical devices,strain gauges,MEMS based strain gauge load cells,MEMS technology,force sensors,strain gauge,actuate,gauge factor,microsystem,strain gauge,transduction,
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