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A versatile 30V analog CMOS process in a 0.18μm technology for power management application

Power Semiconductor Devices and ICs(2011)

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摘要
A versatile 30V analog CMOS process in a 0.18 μm technology node has been developed by using cost-effective and modular fashion. To reduce the thermal budget deep NWELL isolation is formed after CMOS well formation. The drain-extended (DE) CMOS from 7V to 30V shows very competitive trade-off performance between the breakdown voltage and the specific on-resistance. In addition, low 1/f noise of 5V CMOS can be obtained by pure gate oxide process.
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关键词
1/f noise,cmos integrated circuits,low-power electronics,cmos well formation,analog cmos process,deep nwell isolation,drain-extended cmos,power management application,pure gate oxide process,size 0.18 mum,voltage 30 v,voltage 5 v,cost effectiveness,transistors,satisfiability,analog circuits,low power electronics,circuit design,logic gate,logic gates,noise,eprom,cmos technology,breakdown voltage,process development
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