A two-port piezoelectric micromachined ultrasonic transducer
Applications of Ferroelectrics, International Workshop Acoustic Transduction Materials and Devices & Workshop Piezoresponse Force Microscopy（2014）
摘要
A two-port piezoelectric micromachined ultrasound transducer (pMUT) has been demonstrated using aluminum nitride (AlN) as the piezoelectric material with good linearity, high acoustic pressure per unit input voltage, and enhanced electromechanical coupling factor. Experimental data are found to match well with values predicted by the theoretical models. The magnitude of the second harmonic of a two-port pMUT is characterized as 485% lower than that of a conventional one-port pMUT.
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关键词
aluminium compounds,micromachining,piezoelectric materials,piezoelectric transducers,ultrasonic transducers,aln,aluminum nitride,electromechanical coupling factor,piezoelectric material,second harmonic magnitude,two-port pmut,two-port piezoelectric micromachined ultrasonic transducer,acoutic pressure,harmonic imaging,linearity,pmut,piezoelectric micromachined ultrasonic transducer,two-port,harmonic analysis,transducers,electrodes,acoustics
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