A 2D CMUT hydrophone array: Characterization results

P Cristman,Omer Oralkan,Xuefeng Zhuang,T J Ma,Srikant Vaithilingam, T E Carver,Ira O Wygant,B T Khuriyakub

Ultrasonics Symposium（2009）

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摘要

As the use of ultrasonic transducers has increased so has the need to measure and characterize their pressure fields. Currently available hydrophones are limited by long scan times, and multiple source pulses to measure large area fields. Using a 2D capacitive micro-machined ultrasonic transducer (CMUT) array and associated electronics we are able to improve on these limitations. The CMUT inherently allows for a tunable sensitivity by changing DC bias. Motivated by the need to improve the characterization of megasonic cleaners used in semiconductor processing we were able to implement such an area hydrophone.

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关键词

hydrophones,ultrasonic cleaning,ultrasonic transducers,2d cmut hydrophone array,2d capacitive micromachined ultrasonic transducer,large area fields,long scan times,megasonic cleaners,multiple source pulses,semiconductor processing,tunable sensitivity,array,cmut,hydrophone,megasonic cleaning,acoustics,sensitivity,pressure measurement

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