Improved Capacitance Density and Reliability of High- $ \kappa$ $\hbox{Ni}/\hbox{ZrO}_{2}/\hbox{TiN}$ MIM Capacitors Using Laser-Annealing Technique

C. Y. Tsai,K. C. Chiang,S. H. Lin, K. C. Hsu, C. C. Chi,Albert Chin

IEEE Electron Device Letters（2010）

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摘要

We have fabricated high-κ Ni/ZrO2/TiN metal-insulator-metal capacitors with a very high 52-fF/μm2 capacitance density, a low leakage current of 1.6 × 10-7A/cm2, and good ten-year reliability with a small ΔC/C of 1.7% at 2 V. From X-ray diffraction measurements, laser annealing can improve the permittivity of ZrO2 due to tetragonal-phase formation which in turn helps enhance capacitance density and...

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关键词

X-ray lasers,Annealing,Capacitors,Leakage current,X-ray diffraction,Density measurement,Capacitance measurement,Current measurement,Permittivity measurement,Electrodes

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