RF-sputtered ITO and ITO:Zr studied by in situ spectroscopic ellipsometry

J M Burst,Timothy J Peshek,T A Gessert, T J Coutts,Xiaonan Li,D H Levi,Sharon M Weiss,B R Rogers

Photovoltaic Specialists Conference（2010）

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摘要

We report results from in situ real-time spectroscopic ellipsometry (RT-SE) investigations into the sputter deposition and subsequent annealing behavior of permittivity-engineered transparent conductive oxide (TCO) films. RT-SE reveals information about the growth dynamics and evolution of the films' electro-optical properties during deposition. We investigate the correlations of the ex situ optical and electrical measurements with structural analysis for select films.

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关键词

annealing,ellipsometry,sputter deposition,zirconium,ito:zr,rf sputtering,growth dynamics,in situ spectroscopic ellipsometry,transparent conductive oxide films,conductivity,indium tin oxide,sputtering,real time,optical scattering,structure analysis

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