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Nanophotonic biosensors in silicon-on-insulator

Solid-State Sensors, Actuators and Microsystems(2013)

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摘要
In this paper, two recent advances in silicon ring resonator biosensors are presented. First, we address the problem that due to the high index contrast, small deviations from perfect symmetry lift the degeneracy of the normal resonator mode. This severely deteriorates the quality of the output signal. To address this, we discuss an integrated interferometric approach to give access to the unsplit, high-quality normal modes of the microring resonator. Second, we demonstrate how digital microfluidics can be used for effective fluid delivery to nanophotonic microring resonator sensors fully constructed in SOI.
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关键词
bioMEMS,biosensors,interferometry,microfluidics,nanophotonics,nanosensors,resonators,silicon-on-insulator,SOI,Si,digital microfluidics,fluid delivery,high index contrast,high-quality normal modes,integrated interferometric approach,nanophotonic biosensors,nanophotonic microring resonator sensors,normal resonator mode,output signal quality,silicon ring resonator biosensors,silicon-on-insulator,small deviations,biosensors,digital microfluidics,nanophotonics,peak splitting,ring resonators,silicon,
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