Direct bonding for silicon photonics

E Augendre,J M Fedeli,D Bordel,B Ben Bakir,C Kopp,Laurent Grenouillet,J M Hartmann,Julie Harduin,P Philippe,N Olivier,M Fournier,Marc Zussy, Kevin R Lefebvre,James C Sturm,L Di Cioccio,Laurent Fulbert,Laurent Clavelier

Photonics Global Conference（2010）

引用 6|浏览47

暂无评分

摘要

In this paper, we discuss the requirements of direct bonding and show how it can provide photonic electronic integrated circuits including surface grating couplers, Ge photodiodes and energy-efficient hybrid Si/III-V lasers.

查看译文

关键词

elemental semiconductors,germanium,integrated optoelectronics,optical couplers,photodiodes,silicon,silicon compounds,silicon-on-insulator,ge,si-sio2,direct bonding,energy-efficient hybrid lasers,photonic electronic integrated circuits,photonics,surface grating couplers,integrated circuit,silicon photonics,silicon on insulator,energy efficient

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要