Fabrication of Perpendicular Magnetic Anisotropic Nd-Fe-B Based Thin Films Through Annealing Nd-Fe-B/Nd-Fe Multilayer

The coercivity enhancement of Nd-Fe-B based magnets is one of the key focuses for the related investigations because the experimental achieved coercivity is far less than the magnetic anisotropy field of the tetragonal Nd2Fe14B phase. Recently, the very high coercivities have been achieved in the sputter deposited Nd-Fe-B thick films and Nd-Ag diffused thin films [1]. However, it was experimentally found that the film compositions are very difficult to control due to the different evaporation rates of Nd, Fe and B elements, which are very dependent on the machines. Thus, a new way for achieving the high coercive Nd-Fe-B films is very worthy searching.