Monolithic integration of quantum cascade lasers and passive components

Montoya, J.,Wang, C.,Goyal, A., Creedon, K.

Lasers and Electro-Optics（2015）

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摘要

We present a method to integrate quantum cascade lasers with passive components using proton implantation. Proton implantation reduces the intersubband and free-carrier absorption optical loss. We have measured a loss α=0.33 cm-1 in proton implanted waveguides.

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关键词

integrated optoelectronics,ion implantation,optical losses,quantum cascade lasers,waveguide lasers,free-carrier absorption optical loss,intersubband absorption optical loss,monolithic integration,passive components,proton implanted waveguides,quantum cascade lasers

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