The concept and realization of nanostructure fabrication using free-standing metallic wires with rapid thermal annealing
Science China-physics Mechanics & Astronomy(2014)
摘要
Free-standing metallic nanostructures are considered to be highly relevant to many branches of science and technology with applications of three dimensional metallic nanostructures ranging from optical reflectors, actuators, and antenna, to free-standing electrodes, mechanical, optical, and electrical resonators and sensors. Strain-induced out-of-plane fabrication has emerged as an effective method which uses relaxation of strain-mismatched materials. In this work, we report a study of the thermal annealing-induced shape modification of free-standing nanostructures, which was achieved by introducing compositional or microstructural nonuniformity to the nanowires. In particular gradient, segmented and striped hetero-nanowires were grown by focused-ion-beam-induced chemical vapor deposition, followed by rapid thermal annealing in a N 2 atmosphere. Various free-standing nanostructures were produced as a result of the crystalline/grain growth and stress relief.
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关键词
thermal annealing, strain-induced deformation, free-standing, three-dimensional nanofabrication, 046801
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