Improved thermal management of InP transistors in transferred-substrate technology with diamond heat-spreading layer

Electronics Letters(2015)

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摘要
A method to improve the thermal management of indium phosphide (InP) double-hetero bipolar transistors (DHBTs) fabricated in a transferred-substrate technology is presented. A vapour-phase deposited diamond layer acting as a heat spreader is heterogeneously integrated into the vertical layer stack. It is observed that the diamond layer reduces the thermal resistance of a 0.8 × 5 μm2 single emitter...
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关键词
diamond,heterojunction bipolar transistors,III-V semiconductors,indium compounds,thermal resistance,vapour deposition
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