Effects of substrate temperature on performance of calcium-doped zinc oxide TFTs

Yu Wen,Han Dedong,Shi Pan,Cong Yingying,Zhang Yi,Dong Junchen,Zhou Xiaoliang,Huang Lingling,Cui Guodong,Zhang Shengdong,Zhang Xing,Wang Yi

Electronics Letters（2015）

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摘要

In this reported work, high-performance fully transparent bottom-gate-type calcium-doped zinc oxide thin-film transistors (Ca-ZnO TFTs) have been successfully fabricated on glass substrate. The effects of substrate temperature during active layer deposition on the electrical properties of Ca-ZnO TFTs were investigated and an optimum condition (substrate temperature: 100°C) was achieved. The optimi...

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关键词

calcium,thin film transistors,zinc compounds

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