Characterization of Low Noise TES Detectors Fabricated by D-RIE Process for SAFARI Short-Wavelength Band

SRON is developing TES detectors based on a superconducting Ti/Au bilayer on a suspended SiN membrane for the short-wavelength band of the SAFARI instrument on SPICA mission. We have recently replaced the wet KOH etching of the Si substrate by deep reactive ion etching. The new process enables us to fabricate the detectors on the substrate and release the membrane at the very last step. Therefore the production of SAFARI large arrays (43 × 43) on thin SiN membrane (250 nm) is feasible. It also makes it possible to realize narrow supporting SiN legs of ≤ 1 m, which are needed to meet SAFARI NEP requirements. Here we report the current–voltage characteristics, noise performance and impedance measurement of these devices. The measured results are then compared with the distributed leg model that takes into account the thermal fluctuation noise due to the SiN legs. We measured a dark NEP of ∼ 0.7 aW/ √(Hz) , which is 1.6 times higher than the theoretically expected phonon noise.