Influence of ion implantation on physical properties of YBa 2 Cu 3 O x

Vasilij Šmatko,Pavol Čičmanec,František Hanic,Vladimír Štrbík,Štefan Beňačka,Štefan Chromik,Dušan Beňovič,Eva Kováčová

Czechoslovak Journal of Physics（1996）

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摘要

Superconducting thin films of YBa2Cu3Ox were implanted by O+ ion beam of 3×10−2 μAcm−2 density and 100 keV energy, with an impact of 5×1013 O+ cm−2. X-ray analyses have shown creation of defect structure and phase decomposition of implanted part of the film.

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关键词

High Temperature Superconductor, Sapphire Substrate, YBCO Film, Fast Particle, Thin Film Property

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