Ion Scattering And Electron Spectroscopy Of The Chemical Species At A Hf-Prepared Si(211) Surface

The species and the nature of their chemical bonds at the surface of a hydrogen-terminated Si(211) wafer were characterized using temperature desorption spectroscopy, ion scattering spectroscopy, and electron spectroscopy. The surface region is dominated by monohydride species with dihydrides present in small amounts. Fluorine is distributed across the top layer as largely a physisorbed species to the Si substrate. Low-energy He-3(+) ions remove the H and F species with only minimal damage to the underlying region. (c) 2006 American Institute of Physics.