Zero Lattice Mismatch And Twin-Free Single Crystalline Scn Buffer Layers For Gan Growth On Silicon

L Lupina,M H Zoellner,T Niermann,B Dietrich,G Capellini, S B Thapa, M Haeberlen, Martin Lehmann,P Storck, T Schroeder

APPLIED PHYSICS LETTERS(2015)

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摘要
We report the growth of thin ScN layers deposited by plasma-assisted molecular beam epitaxy on Sc2O3/Y2O3/Si(111) substrates. Using x-ray diffraction, Raman spectroscopy, and transmission electron microscopy, we find that ScN films grown at 600 degrees C are single crystalline, twin-free with rock-salt crystal structure, and exhibit a direct optical band gap of 2.2 eV. A high degree of crystalline perfection and a very good lattice matching between ScN and GaN (misfit < 0.1%) makes the ScN/Sc2O3/Y2O3 buffer system a very promising template for the growth of high quality GaN layers on silicon. (C) 2015 AIP Publishing LLC.
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