Nano-Electron Beam Induced Current And Hole Charge Dynamics Through Uncapped Ge Nanocrystals
APPLIED PHYSICS LETTERS(2012)
摘要
Dynamics of hole storage in spherical Ge nanocrystals (NCs) formed by a two step dewetting/nucleation process on an oxide layer grown on an n-doped < 001 > silicon substrate is studied using a nano-electron beam induced current technique. Carrier generation is produced by an electron beam irradiation. The generated current is collected by an atomic force microscope-tip in contact mode at a fixed position away from the beam spot of about 0.5 mu m. This distance represents the effective diffusion length of holes. The time constants of holes charging are determined and the effect of the NC size is underlined. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4705299]
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关键词
atomic force microscopy, carrier lifetime, EBIC, electron beam effects, elemental semiconductors, germanium, nanofabrication, nanostructured materials, nucleation, semiconductor growth
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