Thermal Instability And The Growth Of The Ingaas/Algaas Pseudomorphic High Electron Mobility Transistor System

APPLIED PHYSICS LETTERS(2007)

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摘要
The effects of temperature overshoot during molecular beam epitaxy growth on the transport properties of conventionally and delta-doped pseudomorphic high electron mobility transistor (pHEMT) structures have been examined. A diffuse reflectance spectroscopy (DRS)-controlled versus a thermocouple (TC)-controlled, growth scheme is compared. Several advantages of the DRS-grown pHEMTs over the TC-controlled version were observed. Modest improvements in mobility, on the order of 2%-3%, were observed in addition to a 20% reduction in carrier freeze-out for the DRS-grown pHEMTs at 77 K. (c) 2007 American Institute of Physics.
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关键词
molecular beam epitaxy,diffuse reflectance spectroscopy
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