Solutions Strategies for Die Shift Problem in Wafer Level Compression Molding

IEEE Transactions on Components, Packaging and Manufacturing Technology(2011)

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摘要
Die shift problem that arises during the wafer molding process in embedded micro wafer level package fabrication was systematically analyzed and solution strategies were developed. A methodology to measure die shift was developed and applied to create maps of die shift on an 8 inch wafer. A total of 256 dies were embedded in an 8 inch mold compound wafer using compression molding. Thermal and cure...
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关键词
Compounds,Silicon,Fabrication,Lithography,Packaging,Copper
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