Electrical transport of an AlGaN/GaN two-dimensional electron gas

A. Saxler, P. Debray, R. Perrin, S. Elhamri, W. C. Mitchel, C.R. Elsass, I.P. Smorchkova,B. Heying, E. Haus,P. Fini,J.P. Ibbetson,S. Keller, P.M. Petroff,S.P. DenBaars,U.K. Mishra,J.S. Speck

MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH(2020)

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摘要
An Al x Ga 1−x N/GaN two-dimensional electron gas structure with x = 0.13 deposited by molecular beam epitaxy on a GaN layer grown by organometallic vapor phase epitaxy on a sapphire substrate was characterized. Hall effect measurements gave a sheet electron concentration of 5.1×10 12 cm −2 and a mobility of 1.9 × 10 4 cm 2 /Vs at 10 K. Mobility spectrum analysis showed single-carrier transport and negligible parallel conduction at low temperatures. The sheet carrier concentrations determined from Shubnikov-de Haas magnetoresistance oscillations were in good agreement with the Hall data. The electron effective mass was determined to be 0.215±0.006 m 0 based on the temperature dependence of the amplitude of Shubnikov-de Haas oscillations. The quantum lifetime was about one-fifth of the transport lifetime of 2.3 × 10 −12 s.
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关键词
two dimensional electron gas,composite material,hall effect,effective mass,spectrum analysis,oscillations,thin film,molecular beam epitaxy
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