Electrical transport of an AlGaN/GaN two-dimensional electron gas
MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH(2020)
摘要
An Al x Ga 1−x N/GaN two-dimensional electron gas structure with x = 0.13 deposited by molecular beam epitaxy on a GaN layer grown by organometallic vapor phase epitaxy on a sapphire substrate was characterized. Hall effect measurements gave a sheet electron concentration of 5.1×10 12 cm −2 and a mobility of 1.9 × 10 4 cm 2 /Vs at 10 K. Mobility spectrum analysis showed single-carrier transport and negligible parallel conduction at low temperatures. The sheet carrier concentrations determined from Shubnikov-de Haas magnetoresistance oscillations were in good agreement with the Hall data. The electron effective mass was determined to be 0.215±0.006 m 0 based on the temperature dependence of the amplitude of Shubnikov-de Haas oscillations. The quantum lifetime was about one-fifth of the transport lifetime of 2.3 × 10 −12 s.
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关键词
two dimensional electron gas,composite material,hall effect,effective mass,spectrum analysis,oscillations,thin film,molecular beam epitaxy
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