A 100 Khz Vibratory Mems Rate Gyroscope With Experimental Verification Of System Model'S Frequency Scaling

The working frequency f(0) of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f(0) we designed a new device with f(0)=100 kHz. Key parameters of the 100 kHz device are theoretically and experimentally compared with those of a 15 kHz reference sensor. The experimental results show the validity of the theoretical frequency scaling of the key parameters. The measurements show benefits and disadvantages of MEMS vibratory gyroscopes with increased f(0)>>30 kHz.