Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging

Hassane Oulachgar,Philip Daniel Mauskopf,Martin Bolduc,Samir Ilias,J E Paultre,D Damato,Marc Terroux,Timothy D Pope,Christine Alain,Patrice Topart,Hubert Jerominek

Infrared, Millimeter, and Terahertz Waves（2013）

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摘要

A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.

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关键词

cmos integrated circuits,bolometers,focal planes,micromachining,readout electronics,terahertz wave imaging,vanadium compounds,cmos readout circuit,mems surface micromachining techniques,thz camera,vo,design,focal plane array,frequency 4.25 thz,frequency selective uncooled microbolometer,microfabrication,terahertz imaging,uncooled microbolometer detectors,vanadium oxide technology

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