Method of drying passivated micromachines by dewetting from a liquid-based process
mag（2000）
关键词
film,contact angle,micromachines,capillary,surface energy,surfaces,degree,process,chemicals,dry,method,forces,processing,microstructures,angle,dewetting,drying,microstructure,energy,self assembled monolayer,adhesion,surface,monolayer,step
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