Current Developments In Contactless Measurements Of High Quality Materials For Microelectronics And Nanotechnology Employing Dielectric Resonator Techniques
2011 IEEE REGION 10 CONFERENCE TENCON 2011（2011）
摘要
Progress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in non-destructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.
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关键词
microwave measurements, dielectric resonators, resistivity mapping, semiconductors, graphene, metamaterials, graphen, sheet resistance, conductivity
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