Introduction Of A Die-To-Database Verification Tool For The Entire Printed Geometry Of A Die - Geometry Verification System Ngr2100 For Dfm

The Geometry Verification System NGR2100 enables verification of the entire die, on a resist or an after-etch wafer, by comparing imacres of a die with corresponding target CAD data. The system detects systematic defects by variable criteria setting for allowable deformation quantities and obtains a CD distribution diagram. The result of systematic defects can then be used to make root cause analysis. The CD distribution diagram can achieve stepper aberration analysis, process windows extraction, macro-loading effect analysis, FEM measurement, and trend analysis more efficiently. Consequently, the Geometry Verification System NGR2100 will contribute to quicker TAT for DFM in Design, Lithography and Mask production.