Top-Down Fabrication of Silicon Nanowires in Ultra-deep TrenchesZuhal Tasdemir,Davide Sacchetto,Oliver Peric,Georg E Fantner,Yusuf Leblebici,B Erdem Alacamag(2014)引用 23|浏览3暂无评分关键词e beam lithographyAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要