Metal gate integration structure and method including metal fuse, anti-fuse and/or resistor
Douglas D Coolbaugh, Ebenezer E Eshun, Ephrem G Gebreselasie,Zhongxiang He, Herbert L Ho,Deokkee Kim,Chandrasekharan Kothandaraman,Dan Moy,Robert M Rassel,John M Safran, Kenneth J Stein,N Robson,Pingchuan Wang, Hongwen Yan mag(2009)
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