Method for ultra-uniform sputter deposition using simultaneous RF and DC power on targetRongjun Wang,Xianmin Tang,Zhendong Liu,Tzajing Gung,Maurice E Ewertmag(2015)引用 24|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要